Computing glossary

Multipatterning

Also called multi-patterning, double patterning, SADP, SAQP, LELE, self-aligned double patterning, self-aligned quadruple patterning

Printing a dense layer in two or more exposure and etch steps so each step prints sparser features. It extends older lithography to finer pitches at the cost of more steps, time and overlay risk.

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Semiconductor manufacturing and lithography

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